Active vibration isolation – Bilz Vibration Technology AG
AIS™ Active Isolation System

Active electronic-pneumatic vibration isolation with 3 or 6 degrees of freedom.

Active vibration isolation with powerful real-time control for the highest demands on effective isolation, deflection and constant level. The modular system operates without disturbing heat generation, magnetic field fluctuations or high power consumption.

Active vibration isolation with powerful real-time control for the highest demands on effective isolation, deflection and constant level. The modular system operates without disturbing heat generation, magnetic field fluctuations or high power consumption.

General product description

General

With the AIS™ Active Isolation System, active control significantly improves vibration isolation by suppressing amplification at resonance without degrading properties at higher frequencies. In this process, the AIS™ maintains its active properties over the entire working travel (stroke) of the air spring.
In dynamic applications, the active response of the system ensures reduced deflection times after excitation. The system is consequently quicker at rest and in measuring tasks with positioning movements achieves shorter cycle times than passive systems.
The special feature of the system is the pneumatic actuator principle, which covers a wide dynamic working range – even in the case of very heavy machines. Control bandwidths up to the 300 Hz range are possible due to extremely fast-reacting valves. The system reacts in real time and consequently so quickly that its performance is in no way inferior to that of a vibration isolation system with complex feed-forward signal control.

The AIS™ can be used with three or six actively controlled degrees of freedom (DOF). The system can be adapted to the different application requirements. Three vertically aligned controllers are used with three regulated degrees of freedom, which actively regulate the vertical position and the rotations around both horizontal axes. The other degrees of freedom are passively reset by the membranes.
With the use of 6 controlled degrees of freedom, the HAB horizontal air springs are also used. In this configuration, six controllers are arranged both vertically and horizontally.

Schematische Darstellung des Aufbaus eines Bilz Active Isolation System AIS™ - 3 Freiheitsgrade

4-point AIS™ for 3 (3 DOF) or 6 (6 DOF) actively controlled degrees of freedom

Schematische Darstellung des Aufbaus eines Bilz Active Isolation System AIS™ - 6 Freiheitsgrade

4-point AIS™ for 3 (3 DOF) or 6 (6 DOF) actively controlled degrees of freedom

AIS™ High Performance

Additional BiAir air springs rotated by 90° are used in the AIS™ High Performance version to generate higher horizontal counter forces. The horizontal HAB air springs act purely as air bearings. This eliminates even minor friction effects and influences of the membrane.

Schematische Darstellung des Aufbaus eines Bilz Active Isolation System High Performance AIS™ - 6 Freiheitsgrade

4-point AIS™ for 6 (6 DOF) actively controlled degrees of freedom

System structure AIS™

System structure AIS™ (simplified)
Systemaufbau eines Bilz Active Isolation System AIS™

System structure Active Vibration Isolation AIS™ (schematic illustration)

Darstellung der Anordnung der Regler für ein 6 DOF Bilz Active Isolation System AIS™

Controller arrangement for a 6 DOF AIS™

Properties
  • Active electronic-pneumatic vibration isolation with up to six controlled degrees of freedom.
  • Can also be retrofitted from 3 to 6 DOF using spacers.
  • Highly effective vibration isolation without resonance amplification.
  • Optimal positioning precision in vertical and horizontal plane.
  • Minimal deflection and subsidence times when machine changes loads.
  • Highly effective real-time control.
  • PLC, CAN bus and one control per degree of freedom and highly dynamic proportional position control valve.
  • Each control unit has a microprocessor and integrated, high-resolution sensor technology for position, pressure and acceleration.
  • Easy-to-use, intelligent software for commissioning and diagnostics.
  • Simple digital switching between scanning mode (during sensitive machine operations) and loading mode (during machine load changes).
  • No feed-forward signal required.
  • In contrast to electro-magnetic actuators or linear motors, no generation of heat or magnetic fields which could disturb machine operation.

Technical DAta and variants

Darstellung der Übertragungsfunktion AIS™ (interpolierte Systemmessung auf Shakerprüfstand)

Transmission function AIS™ (interpolated system measurement on shaker test bench)

AIS™ technical data overview
AIS™
3 degrees of freedom
AIS™
6 degrees of freedom
AIS™ High Performance 6 degrees of freedom
Typical system load*
AIS™ 3 degrees of freedom
800 kg – 120.000 kg
AIS™ 6 degrees of freedom
800 kg – 120.000 kg
AIS™ High Performance 6 degrees of freedom
800 kg – 120.000 kg
Vertical natural frequencies*
AIS™ 3 degrees of freedom
1,2 – 2,5 Hz
AIS™ 6 degrees of freedom
1,2 – 2,5 Hz
AIS™ High Performance 6 degrees of freedom
1,2 – 2,5 Hz
Horizontal natural frequencies*
AIS™ 3 degrees of freedom
2,2 – 2,8 Hz
AIS™ 6 degrees of freedom
1,1 – 1,9 Hz
AIS™ High Performance 6 degrees of freedom
0,8 – 1,9 Hz
Type of control
AIS™ 3 degrees of freedom
Servo-pneumatic
AIS™ 6 degrees of freedom
Servo-pneumatic
AIS™ High Performance 6 degrees of freedom
Servo-pneumatic
Actively controlled frequency range
AIS™ 3 degrees of freedom
0-15 Hz
AIS™ 6 degrees of freedom
0-15 Hz
AIS™ High Performance 6 degrees of freedom
0-15 Hz
Clean room suitable
AIS™ 3 degrees of freedom
yes
AIS™ 6 degrees of freedom
yes
AIS™ High Performance 6 degrees of freedom
yes
Communication interfaces
AIS™ 3 degrees of freedom
Ethernet, Digital I/O, RS232
AIS™ 6 degrees of freedom
Ethernet, Digital I/O, RS232
AIS™ High Performance 6 degrees of freedom
Ethernet, Digital I/O, RS232
SENSOR RESOLUTION:
AIS™ 3 degrees of freedom
AIS™ 6 degrees of freedom
AIS™ High Performance 6 degrees of freedom
Displacement measuring system
AIS™ 3 degrees of freedom
0,2 µm
AIS™ 6 degrees of freedom
0,2 µm
AIS™ High Performance 6 degrees of freedom
0,2 µm
Acceleration sensor
AIS™ 3 degrees of freedom
8 µg
AIS™ 6 degrees of freedom
8 µg
AIS™ High Performance 6 degrees of freedom
8 µg
Pressure sensor
AIS™ 3 degrees of freedom
0,2 mbar
AIS™ 6 degrees of freedom
0,2 mbar
AIS™ High Performance 6 degrees of freedom
0,2 mbar
Sampling rate sensor signals
AIS™ 3 degrees of freedom
4 kHz (after oversampling)
AIS™ 6 degrees of freedom
4 kHz (after oversampling)
AIS™ High Performance 6 degrees of freedom
4 kHz (after oversampling)

*Customised modifications possible

AIS™ Active Isolation System

Applications
  • Microscopy applications (TEM, SEM, STM, FIB)
  • Inspection and production machines in the semiconductor industry (lithography, mirror measurement, electron beam applications)
  • Measuring and testing machines (roughness measuring machines, coordinate measuring machines, optical 3D measuring technology, robotic measuring cells)
  • Vibration foundations for laboratories
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