Real-time level control for highly dynamic and vibration sensitive machines and instruments.

• Optimum positional accuracy (+/-8 µm)
• Individually adjustable system parameters (such as damping)
• Short deflection and settling times in response to load changes
• One high-performance servo valve and one displacement sensor per degree of freedom
• Optimised connecting system using CAN bus technology
• Intelligent browser-based user interface for setting, diagnostics and monitoring, connection via Ethernet, remote maintenance possible
• Operator status display (e.g. ready, working position, motion complete, error)
• Digital I/O interfaces for external control and monitoring
• Noise-free control due to high-resolution signal processing and servo-valve technology
• Robust and proven air spring technology, can be combined with Bilz BiAir® membrane air springs
• No disturbing heat generation, magnetic field fluctuations or high power consumption as in electromagnetic actuators

The high-performance electronics, comprising a 14-bit AD converter and 16-bit signal processor, are integrated into the pressure control valves and so ensure virtually noise-free control. Losses (pressure drops) within the hose connections are minimised by directly connecting the pressure control valves to the respective air springs. The use of CAN bus technology means that the control unit can be installed up to 20 m away. The EPPC™ is consequently suitable for use in sensitive environments such as clean rooms or laboratories.

Theoretical vibration curve of a mechanical-pneumatic level control system (MPN) compared to the EPPC™. At a deflection of -80 μm, the MPN reaches a stable position within +/-15 μm after approx. 0.75 seconds. With the EPPC™, the deflection time is reduced by 45 % to 0.4 seconds.

• High-precision machines
• Vibration-sensitive and highly dynamic measuring machines
• Microscopes
• Test and production machines in the semiconductor industry